首页> 外文学位 >A novel conductive-polymer-based integration process for high-performance flip-chip packages.
【24h】

A novel conductive-polymer-based integration process for high-performance flip-chip packages.

机译:一种基于导电聚合物的新型集成工艺,用于高性能倒装芯片封装。

获取原文
获取原文并翻译 | 示例

摘要

Conductive polymers have recently attracted considerable attention for low-temperature fabrication of lead-free, reworkable, and flexible flip-chip interconnects. Using these materials, I demonstrate in this thesis a process that enables low-cost and high-resolution flip-chip interconnects using conventional micro-fabrication techniques. This fabrication process offers improved performance as compared to conventional flip-chip techniques, such as screen-printing, and allows for definition of interconnects with excellent surface uniformity and control over the bump profile.;In order to demonstrate the utility and wide applicability of this process, several test implementations that serve as case studies were investigated. Specifically, novel InGaAsSb avalanche photodiodes (APDs), operating around lambda = 2m and targeted for free-space communication and biomedical spectroscopy applications, were fabricated and flip-chip-integrated to test the static electrical characteristics of the polymer bumps. Additionally, the dynamic electrical performance characteristics of the polymer bumps were studied by using AlGaAsSb/AlGaSb p-i-n photodetectors as a case study. The fabrication of these photodetectors, operating around lambda = 1.55mum and targeted for optical communication applications, was accomplished using a customized inductively coupled plasma (ICP) etch process that resulted in a low dark current and excellent speed (3dB bandwidth of 10GHz) and, responsivity (60% external quantum efficiency) characteristics.;Furthermore, flip-chip integration was used to demonstrate a three-dimensional, point-to-point micro-optical interconnect, which was 2.33mm-long in a system 15.27mm3 in volume. Lastly, high-speed parallel optical interconnects were demonstrated using polymer-flip-chip-integrated 10GHz vertical-cavity surface-emitting laser (VCSEL) and DOEs. Such interconnects offer the ability to alleviate the communication bottleneck that is projected to occur in future, high-performance computing systems.
机译:导电聚合物最近在低温制造无铅,可返工和柔性倒装芯片互连中引起了相当大的关注。使用这些材料,我在本文中演示了一种使用常规微加工技术实现低成本和高分辨率倒装芯片互连的工艺。与传统的倒装芯片技术(例如丝网印刷)相比,该制造工艺提供了更高的性能,并允许定义具有出色的表面均匀性的互连并控制凸点轮廓。;以证明其实用性和广泛的适用性在此过程中,研究了一些用作案例研究的测试实现。具体而言,制造了新颖的InGaAsSb雪崩光电二极管(APD),其工作在λ= 2m左右,目标用于自由空间通信和生物医学光谱学应用,并进行倒装芯片集成以测试聚合物凸点的静电特性。此外,以AlGaAsSb / AlGaSb p-i-n光电探测器为案例研究了聚合物凸块的动态电性能特征。这些光电探测器的制造工作在λ=1.55μm左右,并针对光通信应用而定,它是使用定制的感应耦合等离子体(ICP)蚀刻工艺完成的,该工艺可产生低暗电流和出色的速度(3dB带宽为10GHz),并且响应性(外部量子效率为60%)特性。此外,倒装芯片集成用于演示三维,点对点微光学互连,该系统在15.27mm3体积的系统中长2.33mm。最后,使用集成了聚合物倒装芯片的10GHz垂直腔面发射激光器(VCSEL)和DOE演示了高速并行光学互连。这种互连提供了缓解预计在未来高性能计算系统中发生的通信瓶颈的能力。

著录项

  • 作者

    Lohokare, Saurabh.;

  • 作者单位

    University of Delaware.;

  • 授予单位 University of Delaware.;
  • 学科 Engineering Electronics and Electrical.;Physics Optics.
  • 学位 Ph.D.
  • 年度 2004
  • 页码 142 p.
  • 总页数 142
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

  • 入库时间 2022-08-17 11:44:21

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号