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Methods of using a silicon nanoparticle fluid to control in situ a set of dopant diffusion profiles
Methods of using a silicon nanoparticle fluid to control in situ a set of dopant diffusion profiles
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机译:使用硅纳米粒子流体原位控制一组掺杂剂扩散曲线的方法
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摘要
Disclosed are methods of forming multi-doped junctions, which utilize a nanoparticle ink to form an ink pattern on a surface of a substrate. From the ink pattern, a densified film ink pattern can be formed. The disclosed methods may allow in situ controlling of dopant diffusion profiles.
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