首页> 外国专利> Spherical aberration correction appropriate position search apparatus, and spherical aberration correction appropriate position search method

Spherical aberration correction appropriate position search apparatus, and spherical aberration correction appropriate position search method

机译:球面像差校正合适位置搜索装置和球面像差校正合适位置搜索方法

摘要

A focus error amplitude obtaining device is configured to obtain amplitudes of a focus error signal. An error amplitude difference calculation device is configured to calculate an error amplitude difference which is a difference between the amplitudes of the focus error signal obtained at two different positions in a moving range of a spherical aberration correction device. An appropriate position search control device is in charge of overall control of structural elements; spherical aberration correction device movement control device, focus error amplitude obtaining device, and error amplitude difference calculation device. The appropriate position search control device decides an appropriate position of the spherical aberration correction device based on the error amplitude difference.
机译:聚焦误差幅度获取装置被配置为获取聚焦误差信号的幅度。误差幅度差计算装置被配置为计算误差幅度差,该误差幅度差是在球面像差校正设备的移动范围内的两个不同位置处获得的聚焦误差信号的幅度之间的差。适当的位置搜索控制装置负责结构元件的整体控制;球面像差校正装置运动控制装置,聚焦误差幅度获取装置和误差幅度差计算装置。适当位置搜索控制装置基于误差幅度差来决定球面像差校正装置的适当位置。

著录项

  • 公开/公告号US8310908B2

    专利类型

  • 公开/公告日2012-11-13

    原文格式PDF

  • 申请/专利权人 TAKAHIRO YAMAGUCHI;

    申请/专利号US201113297800

  • 发明设计人 TAKAHIRO YAMAGUCHI;

    申请日2011-11-16

  • 分类号G11B11/00;

  • 国家 US

  • 入库时间 2022-08-21 16:44:48

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