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SPHERICAL ABERRATION CORRECTION PROPER POSITION SEARCH DEVICE AND SPHERICAL ABERRATION CORRECTION PROPER POSITION SEARCH METHOD
SPHERICAL ABERRATION CORRECTION PROPER POSITION SEARCH DEVICE AND SPHERICAL ABERRATION CORRECTION PROPER POSITION SEARCH METHOD
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机译:球面像差校正正确位置搜索装置和球面像差校正正确位置搜索方法
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摘要
A focus error amplitude obtainer obtains the amplitude of a focus error signal. An error amplitude difference calculator calculates the error amplitude difference, which is the difference of the amplitude in each different position within a movement range of a spherical aberration correction unit. A proper position search controller performs overall control over a spherical aberration correction unit mobile controller, the focus error amplitude obtainer, and the error amplitude difference calculator. A proper position search controller determines a proper position of the spherical aberration correction unit on the basis of the error amplitude difference.
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