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method of detecting positions of photons impingono on a geiger mode avalanche fotodiodo to relating to geiger mode avalanche photodiode and manufacturing process
method of detecting positions of photons impingono on a geiger mode avalanche fotodiodo to relating to geiger mode avalanche photodiode and manufacturing process
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机译:盖格模式雪崩光电二极管上光子撞击的位置检测方法及相关方法
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摘要
A Geiger-mode avalanche photodiode may include an anode, a cathode, an output pad electrically insulated from the anode and the cathode, a semiconductor layer having resistive anode and cathode regions, and a metal structure in the semiconductor layer and capacitively coupled to a region from the resistive anode and resistive cathode regions and connected to the output pad. The output pad is for detecting spikes correlated to avalanche events.
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