METHOD OF DETECTING IMPINGING POSITION OF PHOTONS ON A GEIGER-MODE AVALANCHE PHOTODIODE, RELATED GEIGER-MODE AVALANCHE PHOTODIODE AND FABRICATION PROCESS

摘要

A Geiger-mode avalanche photodiode may include an anode, a cathode, an output pad electrically insulated from the anode and the cathode, a semiconductor layer having resistive anode and cathode regions, and a metal structure in the semiconductor layer and capacitively coupled to a region from the resistive anode and resistive cathode regions and connected to the output pad. The output pad is for detecting spikes correlated to avalanche events.