MEASURING HEAD SYSTEM FOR A COORDINATE MEASURING MACHINE AND METHOD FOR THE OPTICAL MEASUREMENT OF DISPLACEMENTS OF A SCANNING ELEMENT OF THE MEASURING HEAD SYSTEM

摘要

The invention relates to a measuring head system (1) for a coordinatemeasuring machine,having a scanning element (6), which has a part provided for contacting ameasured object as acontacting part (5), which can be moved in relation to a fixed measuring headbase (2) in a lateralx direction (20) and a lateral y direction (21), such that an object to bemeasured can bemechanically scanned using the scanning element (6). An optical sensor (10),having a sensor line(11) which can be read out and comprises a plurality of array sensor elements,is fixed on themeasuring head base (2). Furthermore, means are provided, which areparticularly disposedspatially fixed to the contacting part (5), generate a projection - as afunction of displacements ofthe contacting part (5) in relation to the measuring head base (2) - on thesensor line (11) using atleast one radiation source (15). In addition, an analysis unit is provided.The means have at leastone first mask element (17), which is implemented to generate a first partialprojection on thesensor line (11) such that said partial projection is optimized to determinean x displacement anda y displacement of the contacting part (5) in relation to the measuring headbase (2) in the xdirection or y direction. The analysis unit is configured to determine the xdisplacement and the ydisplacement from signals only generated by the one sensor line (11).