Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage

摘要

Today, with the development of microsystem technologies, demands for three-dimensional (3D) metrologies for microsystem components have increased. High-accuracy micro-coordinate measuring machines (micro-CMMs) have been developed to satisfy these demands. A high-precision micro-CMM (M-CMM) is currently under development at the National Metrology Institute of Japan in the National Institute of Advanced Industrial Science and Technology (AIST), in collaboration with the University of Tokyo. The moving volume of the M-CMM is 160 mm X 160 mm X 100 mm (XYZ), and our aim is to achieve 50-nm measurement uncertainty with a measuring volume of 30 mm X 30 mm X 10 mm (XYZ). The M-CMM configuration comprises three main parts: a cross XY-axis, a separate Z-axis, and a changeable probe unit. We have designed a multi-probe measurement system to evaluate the motion accuracy of each stage of the M-CMM. In the measurement system, one autocollimator measures the yaw error of the moving stage, while two laser interferometers simultaneously probe the surface of a reference bar mirror that is fixed on top of an XY linear stage. The straightness motion error and the reference bar mirror profile are reconstructed by the application of simultaneous linear equations and least-squares methods. In this paper, we have discussed the simulation results of the uncertainty value of the multi-probe measurement method using different intervals and standard deviations of the laser interferometers. We also conducted pre-experiments of the multi-probe measurement method for evaluating the motion errors of the XY linear stage based on a stepper motor system. The results from the pre-experiment verify that the multi-probe measurement method performs the yaw and straightness motion error measurement extremely well. Comparisons with the simulation results demonstrate that the multi-probe measurement method can also measure the reference bar mirror profile with a small standard deviation of 10 nm.