MEASUREMENT METHOD AND SYSTEM OF MOTION ERROR WHICH ENABLES A USER TO MEASURE MOTION ERRORS OF A LINEAR STAGE

摘要

PURPOSE: A measurement method and system of motion error is provided to measure motion errors of a linear stage and to enable a user to easily control installation and manipulation times.;CONSTITUTION: A measurement method comprises a light emitting member(10), a diffraction grating(33), an optical path formation member, a first position detection member(41) and a second position detecting element(42). The light emitting member outputs the laser light of the fixed wavelet. The diffraction grating is attached to one side of a linear stage(32). The optical path formation member forms the optical path and is formed in the laser light is the diffraction grating.;COPYRIGHT KIPO 2012