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SURFACE-EMITTING LASER ARRAY, OPTICAL SCANNING DEVICE, AND IMAGE FORMING DEVICE

机译:表面发射激光阵列,光学扫描设备和图像形成设备

摘要

A surface-emitting laser array includes a plurality of surface-emitting laser elements (1). Each surface-emitting laser element includes a first reflection layer (102) formed on a substrate (101), a resonator cavity (103, 104, 105) formed in contact with the first reflection layer and containing an active layer (104), and a second reflection layer (106, 107) formed over the first reflection layer and in contact with the resonator cavity. The second reflection layer contains a selective oxidation layer (107). The first reflection layer contains on the active layer side at least a low refractive index layer (1021), made e.g. of AlAs, having an oxidation rate equivalent to or larger than an oxidation rate of the selective oxidation layer (107) contained in the second reflection layer. The resonator cavity is made of an AlGaInPAs base material containing at least In. A bottom of a mesa structure is located below the selective oxidation layer and above the first reflection layer.
机译:表面发射激光器阵列包括多个表面发射激光器元件(1)。每个表面发射激光器元件包括形成在基板(101)上的第一反射层(102),形成为与第一反射层接触并包含有源层(104)的谐振腔(103、104、105),以及第二反射层(106、107)形成在第一反射层上方并与谐振器腔接触。第二反射层包含选择性氧化层(107)。第一反射层在有源层侧上至少包含例如制成的低折射率层(1021)。具有等于​​或大于第二反射层中包含的选择氧化层(107)的氧化速率的AlAs的氧化速率。谐振腔由至少包含In的AlGaInPAs基材制成。台面结构的底部位于选择性氧化层下方和第一反射层上方。

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