HIGH-K/METAL GATE MOSFET WITH REDUCED PARASITIC CAPACITANCE

摘要

The present invention provides a high-k gate dielectric/metal gate MOSFET that has a reduced parasitic capacitance. The inventive structure includes at least one metal oxide semiconductor field effect transistor (MOSFET) 100 located on a surface of a semiconductor substrate 12. The least one MOSFET 100 includes a gate stack including, from bottom to top, a high-k gate dielectric 28 and a metal-containing gate conductor 30. The metal- containing gate conductor 30 has gate corners 31 located at a base segment of the metal- containing gate conductor. Moreover, the metal-containing gate conductor 30 has vertically sidewalls 102A and 102B devoid of the high-k gate dielectric 28 except at the gate corners 31. A gate dielectric 18 laterally abuts the high-k gate dielectric 28 present at the gate corners 31 and a gate spacer 36 laterally abuts the metal-containing gate conductor 30. The gate spacer 36 is located upon an upper surface of both the gate dielectric 18 and the high-k gate dielectric that is present at the gate corners 31.