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METHOD OF INVESTIGATING A SAMPLE SURFACE BY SCANNING PROBE MICROSCOPY WHICH ADJUSTS PROBE MISALIGNMENTS
METHOD OF INVESTIGATING A SAMPLE SURFACE BY SCANNING PROBE MICROSCOPY WHICH ADJUSTS PROBE MISALIGNMENTS
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机译:通过扫描探针显微镜对样品表面进行校正而研究样品表面的方法
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摘要
A method of investigating a sample surface. A probe is brought into close proximity with a first sample and scanned across the first sample. A response of the probe to its interaction with the sample is monitored using a detection system and a first data set is collected indicative of said response. The probe and/or sample is tilted through a tilt angle. The probe is scanned across the first sample or across a second sample after the tilting step, and a response of the probe to its interaction with the scanned sample is monitored using a detection system and a second data set is collected indicative of said response. The method includes the additional step of analysing the first data set prior to tilting the probe and/or sample in order to determine the tilt angle.
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