首页>
外国专利>
METHOD FOR MANUFACTURING A SEMICONDUCTOR MICRO- OR NANOWIRE, SEMICONDUCTOR STRUCTURE COMPRISING SUCH A MICRO- OR NANOWIRE, AND METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE
METHOD FOR MANUFACTURING A SEMICONDUCTOR MICRO- OR NANOWIRE, SEMICONDUCTOR STRUCTURE COMPRISING SUCH A MICRO- OR NANOWIRE, AND METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE
展开▼
机译:制造半导体微或纳米结构的方法,包括这种微或纳米结构的半导体结构以及制造半导体结构的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The invention relates to a method for manufacturing at least one semiconductor micro- or nanowire for forming an optoelectronic structure (10). The method comprises the steps of providing a semiconductor substrate (100), and forming a crystalline so-called buffer layer (110) on the substrate (100), the buffer layer (110) having, on at least a portion of the thickness thereof, a first area (110) mainly consisting of magnesium nitride in the form of MgxNy. The method further comprises the step of forming at least one semiconductor micro- or nanowire (150) on the buffer layer (110). The invention also relates to optoelectronic structures (10) comprising micro- or nanowires (150), and to the method for manufacturing such structures (10).
展开▼
机译:本发明涉及一种用于制造至少一条用于形成光电结构(10)的半导体微线或纳米线的方法。该方法包括以下步骤:提供半导体衬底(100),以及在衬底(100)上形成晶体的所谓的缓冲层(110),该缓冲层(110)在其至少一部分厚度上具有,第一区域(110)主要由Mg x Sub> N y Sub>形式的氮化镁组成。该方法还包括在缓冲层(110)上形成至少一条半导体微或纳米线(150)的步骤。本发明还涉及包括微或纳米线(150)的光电结构(10),并且涉及用于制造这种结构(10)的方法。
展开▼