首页>
外国专利>
TEMPERATURE GRADIENT CONTROL DEVICE FOR CRYSTAL GROWTH AND METHOD THEREOF
TEMPERATURE GRADIENT CONTROL DEVICE FOR CRYSTAL GROWTH AND METHOD THEREOF
展开▼
机译:晶体生长的温度梯度控制装置及其方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A temperature gradient control device for crystal growth and a method thereof, relating to an auxiliary temperature control device of crystal material growth equipment. The temperature gradient control device comprises a furnace chamber (1), a heating element (3), a crucible (5), a sleeve (4), and a coolant cooling mechanism. The crucible in the furnace chamber (1) is disposed in the middle of the sleeve to form an independent space in the sleeve (4) for the lower part of the crucible; the coolant cooling mechanism is disposed in a sleeve space at the lower part of the crucible, and the coolant cooling mechanism cools the lower part of the crucible, so as to form a low-temperature area at the lower part of the crucible. In the present invention, an upper cover is added between the outer part of the crucible and the sleeve or at the upper part of the crucible; by means of the sleeve in combination with the coolant cooling mechanism, the heat gained from the heating element by the upper part of the crucible is higher than heat gained by the lower part of the crucible or the upper cover, so that the heat energy of the heating element is gathered towards the upper part of the crystal material in the crucible; therefore, the temperature of the crystal material at the upper part rises more rapidly, thus implementing the temperature control or temperature guide, and implementing the temperature gradient control for crystal growth.
展开▼