DEVICE AND METHOD FOR PREBAKING ALIGNMENT FILM WITH SUBSTRATE SUPPORTED BY TEMPERATURE CONTROL PIN

摘要

A device and method for prebaking an alignment film with a substrate (4) supported by a temperature control pin (42), the device comprising a heater (41) used to prebake the substrate (4) from below the substrate (4), a plurality of temperature control pins (42) used to support the substrate (4) upward, and a temperature control system (43); the temperature control pins (42) are connected to the temperature control system(43); and the temperature of each temperature control pin (42) can be separately controlled by the temperature control system (43), such that the supporting positions of the temperature control pins (42) on the substrate (4) and the peripheries of the supporting positions are uniformly heated. The device and method for prebaking an alignment film with a substrate (4) supported by a temperature control pin (42) can reduce the uneven heating of a glass substrate surface.