REWORK APPARATUS OF A BONDING ERROR DIE AND A METHOD THEREOF CAPABLE OF BONDING A DIE WITH HIGH QUALITY BY SEPARATING A DEFECTIVE DIE

摘要

PURPOSE: A rework apparatus of a bonding error die and a method thereof are provided to maximize productivity by automating a rework process to bond a die with high quality and separate a defective die.;CONSTITUTION: A support unit(120) absorbs and supports one side of a substrate(110) and is located on the lower side of the support unit. The support unit includes at least one hole inside. A heating unit(130) separates a die(112) from the substrate by absorbing and heating the die. The heating unit includes a die absorbing unit(132) which absorbs the die and a die heating unit(134) which heats the die.;COPYRIGHT KIPO 2013