NANO STRUCTURE, FABRICATING METHOD OF THE NANO STRUCTURE, PHOTOELECTRONIC DEVICE AND PHOTOELECTRONIC DEVICE PACKAGE

摘要

PURPOSE: A nano structure, a method for fabricating a nano structure, a photoelectronic device and a photoelectronic device package are provided to implement fine nano pattern bars by using a nano imprinting method. CONSTITUTION: A seed layer(5) is formed on a substrate(1). A mask layer is formed on the seed layer. A recess is formed in the mask layer by using a mold. A nano pattern bar(9) is formed on the seed layer within the recess.