DIGITAL HOLOGRAPHIC MICROSCOPE FOR 3 DIMENTIONAL DEFECT INSPECTION OF DISPLAY SUBSTRATE AND INSPECTION METHOD USING THE SAME

摘要

PURPOSE: digital holographic microscope and defect detecting method use the distance of the identical display base plate defect for providing the defect display base plate for arriving hologram and without hesitation measuring maximum height to be existed according to the regenerating phase reconstruction image in inversion of phases. ;CONSTITUTION: digital holographic microscope includes a light source (100), a reference light generator (200), in object light generator (300), CCD (charge-coupled device) (400), operating unit (500). Reference light CCD records a hologram by combining reference light and object light. Numerically Analysis interference fringe records operating unit. Operating unit obtains the image of multiple phase reconstructions, and with scheduled regeneration, apart from section, the distance from minimum to maximum regeneration regenerates CCD of the distance relative to hologram record; Continuously regenerate the minimum regeneration distance from phase reconstruction; And the distance of the display base plate defect of maximum height is determined, according to the regenerating phase reconstruction image, exist in inversion of phases. ;The 2013 of copyright KIPO submissions