EMBEDDED TOROID FOR MEASURING FLOWING CURRENT IN A THROUGH SILICON VIA WHICH IS FORMED ON A SILICONE INTERPOSER AND A MANUFACTURING METHOD THEREOF AND SILICONE INTERPOSER

摘要

PURPOSE: An embedded toroid and a manufacturing method thereof and silicone interposer are provided to precisely measure flowing current by directly measuring an actual circumference of a through silicon via by surrounding thereof inside the silicone interposer.;CONSTITUTION: Nearing through silicon vias (NTSV1~NTSV7) are arranged close to the circumference of a through silicon via. Far through silicon vias (FTSV1~FTSV7) are arranged close to the circumference of a through silicon via. Nearing through vias and far through silicon vias are serially connected to the upper wiring pattern (TWP1~TWP7) and bottom wiring pattern (BWP1~BWP6). A test socket (PORT1) is connected to the upper end of the through silicone via. A test socket (PORT2) is connected to the far through silicone via.;COPYRIGHT KIPO 2013