WAFER INSPECTION SYSTEM FOR CONTROLLING ACCURATELY THE POSITION OF A WAFER FOR A PROBE CARD TO A CHARACTERISTIC INSPECTION POSITION FOR THE ELECTRICAL CHARACTERISTICS INSPECTION OF SEMICONDUCTOR DEVICES

摘要

PURPOSE: A wafer inspection system is provided to load a wafer and a probe card into an inspection chamber by using one transfer unit, thereby inspecting easily the wafer.;CONSTITUTION: A probe card (20) has a plurality of probes (25) which is arranged on the surface of the probe card facing a wafer. A frame (40) supports the probe card. A chuck member (23) faces the probe card. A transfer arm (13A) has at least one recess (62). The recess is fitted to at least one positioning pin (61). The probe card is carried into an inspection chamber (14) by the transfer arm and is arranged with the at least one positioning pin by fitting the at least one recess to the at least one positioning pin. The probe card is brought into contact with and supported by the frame.;COPYRIGHT KIPO 2013