ANISOTROPICALLY CONDUCTIVE CONNECTOR FOR WAFER INSPECTION, ITS MANUFACTURING METHOD, PROBE CARD FOR WAFER INSPECTION, AND WAFER INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an anisotropically conductive connector for surely achieving a satisfactory state of electrical connection to a wafer even if the pitch is extremely small between electrodes under inspection on the wafer which is an inspecting object with its contact members kept from being soon uncoupled, and to provide its manufacturing method, a probe card, and a wafer inspection device.;SOLUTION: This anisotropically conductive connector is obtained by: forming a material layer for a conductive elastomer containing conductive particles showing magnetism on a frame plate disposed on a support body; disposing a plurality of metallic masks showing magnetism on its surface, then thereto applying a magnetic field in a thickness direction while performing its hardening treatment thereby forming a conductive elastomer layer; laser-machining this to form a plurality of conductive parts for connection; piling up first and second intermediates, the first intermediate being obtained by forming a material layer for an insulation part between the conductive parts while the second intermediate being obtained by forming the plurality of contact members on a metal film to form material layer for an insulation part between them; and hardening-treating these material layers for insulation parts.;COPYRIGHT: (C)2007,JPO&INPIT