THIN FILM CLUSTER, A THIN FILM PARTICLE, AND A MANUFACTURING METHOD THEREOF CAPABLE OF INCREASING PRODUCT QUALITY

摘要

PURPOSE: A thin film cluster, a thin film particle, and a manufacturing method thereof are provided to manufacture fine particles and nano particles with a physical vapor deposition process.;CONSTITUTION: A manufacturing method of a thin film cluster and a thin film particle is as follows. A thin film layer (1) is partially deposited on a coated material (3). The coated material is formed while physical power is applied to the coated material to displace the coated material. At least one surface substrate of the coated material has a saturated vapor pressure of 100 torr or less at 25°C and a softening point of 650°C or less. The coated material at a time for coating the thin film layer is thicker than the thickness of the thin film layer and has a viscosity of 10 cps or more.;COPYRIGHT KIPO 2013