FABRICATION METHOD OF MOISTURE BARRIER LAYER WITH INORGANIC LAYERS, MOISTURE BARRIER LAYER WITH INORGANIC LAYERS AND ELECTRIC, ELECTRONIC ENCAPSULATION DEVICE

摘要

PURPOSE: A method for manufacturing a moisture penetration-preventing film using an inorganic film, a moisture penetration-preventing film using an organic film, and an electron bag device prevent the penetration of moisture, and absorb the moisture in an element, preventing the degradation of electric elements. CONSTITUTION: A moisture penetration-preventing film (100) comprises a substrate (110), an alternately laminated inorganic film (120) of the amorphous state, and another inorganic film (130) of the amorphous state. The moisture penetration-preventing film successively repeats a first cycle and a second cycle multiple times. The first cycle and the second cycle are performed with the atomic layer deposition mode. The thickness of a film layered for the first cycle is from 0.8 to 1.4 inclusively. The thickness of a film layered for the second cycle is from 0.6 to 1.2 inclusively.