Moisture barrier films containing plasma polymer fluorocarbon/inorganic multilayers fabricated via continuous roll-to-roll sputtering

摘要

We propose a novel fabrication method for the moisture barrier films composed of plasma polymer fluorocarbon (PPFC) and inorganic (SiNx or SiO2) multilayers using a continuous roll-to-roll sputtering process. PPFC thin films are produced via the mid-range frequency sputtering of a carbon nanotube-polytetrafluoroethylene composite target. After depositing a PPFC layer on the surface of the multilayer structure, it exhibited a high degree of water repellency and enhanced transmittance in the visible light region. The produced 2-dyad structure containing a SiNx inorganic layer deposited on a polyethylene terephthalate substrate demonstrates good barrier properties characterized by a water vapor transmittance rate (WVTR) of 1.8x10(-2)g/m(2)/day. By replacing the inorganic layer with a SiO2 thin film, a better barrier film with a WVTR value of 1.1x10(-2)g/m(2)/day is obtained.