MANUFACTURING METHODE OF MEMBRANE FOR CHEMICAL MECHANICAL POLISHING AND MEMBRANE FOR CHEMICAL MECHANICAL POLISHING USING THE SAME

摘要

PURPOSE: A method for manufacturing a membrane for Chemical Mechanical Polishing and the membrane manufactured by the same method are provided to improve reproducibility by using an injection molding method. CONSTITUTION: Reactive polymer raw material is supplied to an injector(211). The reactive polymer raw material includes base polymer, cross-linking agent, and catalyst. The reactive polymer raw material is put into the internal space of a mold(221) through a nozzle of the injector. In the internal space of the mold, the reactive polymer raw material is molded to form a membrane.