机译:W-Ni-Fe合金化学机械抛光的理论与实验研究
Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education Dalian University of Technology Dalian People’s Republic of China;
Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education Dalian University of Technology Dalian People’s Republic of China;
Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education Dalian University of Technology Dalian People’s Republic of China;
Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education Dalian University of Technology Dalian People’s Republic of China;
Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education Dalian University of Technology Dalian People’s Republic of China;
Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education Dalian University of Technology Dalian People’s Republic of China;
EPSRC Hub in Future Metrology Centre for Precision Technologies University of Huddersfield Huddersfield United Kingdom;
Institute for Materials and Processes School of Engineering Sanderson Building University of Edinburgh EH93FB Scotland United Kingdom;
Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education Dalian University of Technology Dalian People’s Republic of China;
Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education Dalian University of Technology Dalian People’s Republic of China;
chemical mechanical polishing; W–Ni–Fe alloy; grain boundary step; modelling; mechanism;