Exhaust oxygen recycling device of ozone processing equipment and ozonation system having the recycling device

摘要

Disclosed herein is an exhaust oxygen recycling apparatus for ozone treatment equipment, which is used to refine an exhaust oxygenic gas, the exhaust oxygenic gas being discharged to the air after reaction in the ozone treatment equipment, and to recycle the refined oxygenic gas to generate ozone, including: an impurity removing unit for removing impurities from components included in the exhaust gas, the impurities being apt to be recognized as impurities in an ozone generator; and a compressor for compressing the exhaust gas or the exhaust gas refined by the impurity removing unit to a pressure at which the exhaust gas or the refined exhaust gas can be supplied to the ozone generator. The exhaust oxygen recycling apparatus purifies exhaust oxygen, discharged to the air after the reaction that takes place in the ozone treatment equipment, so as to recycle the refined oxygenic gas to generate ozone.