PROCESS LIQUID SUPPLY UNIT, LIQUID TREATMENT DEVICE, PROCESS LIQUID SUPPLY METHOD AND STORAGE MEDIUM

摘要

PPROBLEM TO BE SOLVED: To continuously process bodies to be processed without causing processing liquid supplied from a processing section to a body to be processed to pulsate nor generating any wait time. PSOLUTION: A processing liquid supply unit comprises a first supply section 10, a second supply section 20, and a control section 50 which controls flows of processing liquid in the first supply section 10 and second supply section 20. The control section 50, when changing the supply of the processing liquid to a processing section 60 from the first supply section 10 to the second supply section 20, controls a first pumping means 13 to start supplying the processing liquid from the first supply section 10 to the processing section 60 and then stop supplying the processing liquid from the first supply section to the processing section on condition that the processing liquid in the second supply section 20 is in a pumping state and the processing liquid in the first supply section 10 is in a pumping state. PCOPYRIGHT: (C)2009,JPO&INPIT