INSTALLATION FOR SEPARATION AND PREPARATION OF HYDROGEN CHLORIDE AND CHLORINESILANES OF TECHNOLOGICAL LINE OF PRODUCTION OF POLYCRYSTALLINE SILICON

摘要

The utility model relates to the production of polycrystalline silicon, in particular to equipment for separation and preparation of the vapor-gas mixture formed during hydrogen reduction of trichlorosilane and / or silicon tetrachloride conversion, namely to an apparatus for separation and preparation of chlorosilanes and hydrogen chloride. Installation for the separation and preparation of hydrogen chloride, and chlorosilanes polycrystalline silicon manufacturing process line containing a distillation column, the upper part of which communicates through the condenser to a collection of reflux, the output of which the pump is mounted, the output of which communicates with the upper portion of the distillation column and storage of hydrogen chloride, and a system of pipes with shut-off and control valves, wherein the installation is provided with a hydrogen chloride vaporizer and two capacitors and hydrogen chloride, first of which communicates with the storage of hydrogen chloride, and the latter communicates with the hydrogen chloride vaporizer and the lower part of the evaporator is connected via a pipe with the drive of hydrogen chloride and additional piping to the inlet of a pump and a reflux condenser. Thus, the claimed utility model is a unit for separation and preparation of hydrogen chloride, and chlorosilanes technological polysilicon line which provides the necessary preparation of hydrogen chloride for further use at the site of synthesis of trichlorosilane, which design ensures stable operation of the unit in the normal mode of its operation, and also in case of emergencies.