INSTALLATION FOR SEPARATION AND PREPARATION OF HYDROGEN CHLORIDE AND CHLOR-SILANES OF TECHNOLOGICAL LINE OF POLYCRYSTALLINE SILICON PRODUCTION

摘要

An installation for separation and preparation of hydrogen chloride and chlorsilanes of technological line for production of polycrystalline silicon comprises a rectification column, deflegmator with collector of reflux at the outlet of which a pump is installed, rectification string, collector of hydrogen chloride and a system of pipelines with shutoff-control fittings, besides that installation is equipped with evaporator of hydrogen chloride and two condensers of hydrogen chloride.