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Polycrystalline silicon production reactor, polycrystalline silicon production apparatus, polycrystalline silicon production method, and polycrystalline silicon rod or polycrystalline silicon lump
Polycrystalline silicon production reactor, polycrystalline silicon production apparatus, polycrystalline silicon production method, and polycrystalline silicon rod or polycrystalline silicon lump
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机译:多晶硅生产反应器,多晶硅生产设备,多晶硅生产方法,多晶硅棒或多晶硅块
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摘要
A reaction furnace for producing a polycrystalline silicon according to the present invention is designed so as to have an in-furnace reaction space in which a reaction space cross-sectional area ratio (S = [S 0 -S R ]/S R ) satisfies 2.5 or more, which is defined by an inner cross-sectional area (So) of a reaction furnace, which is perpendicular to a straight body portion of the reaction furnace, and a total sum (S R ) of cross-sectional areas of polycrystalline silicon rods that are grown by precipitation of polycrystalline silicon, in a case where a diameter of the polycrystalline silicon rod is 140 mm or more. Such a reaction furnace has a sufficient in-furnace reaction space even when the diameter of the polycrystalline silicon rod has been expanded, and accordingly an appropriate circulation of a gas in the reaction furnace is kept.
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