The present invention relates to a device for the heat - and mass transfer, in particular for drying of thin layers or coatings. In the foreground in this case an impact beam field (3) with hexagonal impact jet nozzles (5) and of the effusion holes (4 arranged). As a result of this geometry of the ausstrahl - and suction nozzles results in a particularly favorable heat - / mass transfer coefficient, with an excellent homogeneity. Therefore, this device is advantageous for the drying sensitive components. Furthermore, the device is suitable for separation processes on surfaces. In addition, a drying hood using said apparatus is proposed. Furthermore, the invention relates to a process for the treatment of surface layers, in particular of the gentle drying of organic (opto -) of electronic components.
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