Method for preparation of needle tip for atom probe tomography, involves guiding through hole of planar drain electrode into measuring position based on measured coordinates of sample for performing tomography by manipulator

摘要

The method involves transferring a carrier element together with a sample from a preparation chamber (1) into a measuring chamber (2) through a transfer channel (3). The carrier element in the measuring chamber is fastened at a measuring desk, which comprises a layer made of sapphire. A through hole of a planar drain electrode is guided into a measuring position based on measured coordinates of the sample for performing tomography by a manipulator fastened at the carrier element, where the planar drain electrode is carried by the manipulator. Independent claims are also included for the following: (1) a carrier element (2) a measuring chamber for atom probe tomography.