METHOD OF MANUFACTURING OPTICAL WAVEGUIDE LIGHT-RECEIVING ELEMENT AND OPTICAL WAVEGUIDE LIGHT-RECEIVING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical waveguide light-receiving element in which the planarity of the ground surface of an MIM capacitor can be enhanced, and to provide an optical waveguide light-receiving element.;SOLUTION: An optical waveguide light-receiving element includes a light-receiving element 13d, an optical waveguide 15f, and a capacitive element 14d integrated on a common substrate 21. The capacitive element 14d has a base layer 49 that is a part of a semiconductor layer grown for forming a core layer 23 of the optical waveguide 15f, a lower metal layer 44 formed on the base layer 49 and connected with one of bias wiring or reference potential wiring, an upper metal layer 45 formed on the lower metal layer 44 and connected with the other of the bias wiring or reference potential wiring, and an insulating film 27 disposed between the lower metal layer 44 and upper metal layer 45.;COPYRIGHT: (C)2014,JPO&INPIT