METHOD AND DEVICE FOR CALCULATING LIGHT QUANTITY DISTRIBUTION, RECORDING MEDIUM RECORDING PROGRAM FOR CALCULATING LIGHT QUANTITY DISTRIBUTION, AND METHOD AND DEVICE FOR EXPOSURE

摘要

PROBLEM TO BE SOLVED: To efficiently and highly accurately calculate light quantity distribution information on a pupil surface of a projection optical system of diffraction light generated from a pattern.;SOLUTION: A method for calculating light quantity distribution information on a projection pupil surface of light from a pattern formed on a predetermined surface with a thin film having a plurality of layers with mutually different complex diffraction indexes includes: a step 116 for inputting information on an illumination pupil which illuminates the pattern; steps 124, 126 for sequentially calculating at least one of the transmissivity and the reflectivity when a light flux from portion of the illumination pupil passes through a boundary surface of the plurality of layers in the pattern, and calculating a first complex amplitude distribution on a virtual surface of the light flux after passing through the pattern; and a step 128 for calculating a second complex amplitude distribution on the projection pupil surface by performing Fourier transformation of the first complex amplitude distribution.;COPYRIGHT: (C)2014,JPO&INPIT