METHOD AND DEVICE FOR COMPUTING LIGHT QUANTITY DISTRIBUTION, RECORDING MEDIUM WITH PROGRAM FOR COMPUTING LIGHT QUANTITY DISTRIBUTION RECORDED THEREON, AND EXPOSURE METHOD AND APPARATUS

摘要

PROBLEM TO BE SOLVED: To efficiently and highly accurately compute light quantity distribution, on a pupil surface of a projection optical system, of diffraction light generated from a pattern.;SOLUTION: A method for computing light quantity distribution, on a projection pupil surface, of light from patterns of a reticle includes: steps 112-116 for inputting information about a table recording therein computation results of intensity information of zero-order diffraction light and first-order diffraction light which are generated when a plurality of patterns having different cycles among the patterns are irradiated with light at first and second incident angles, a Fourier transformation pattern obtained from the patterns and an illumination pupil; and steps 118-122 for obtaining partial light quantity distribution on a projection pupil surface on the basis of a Fourier transformation pattern obtained by correcting a plurality of partial Fourier transformation patterns separated from the Fourier transformation pattern while using the table for each of a plurality of partial illumination pupils of the illumination pupil.;COPYRIGHT: (C)2014,JPO&INPIT