PROBLEM TO BE SOLVED: To generate fine sliding of a terminal contact with high accuracy, determine relative displacement of the terminal contact due to the fine sliding correctly, and observe a secular change in the vicinity of the terminal contact.;SOLUTION: Control means 3 and 11 perform feedback control for determining a drive voltage waveform applied to piezoelectric vibrator drive means 4 by using displacement of a block plate 22a in the reciprocating movement detected by block displacement detection means 36 and relative displacement of fine sliding of a contact between a male terminal 28 and a female terminal 25 detected by relative displacement detection means 8 and 11, and output a change of electrical characteristics of a terminal contact measured by electrical characteristic measurement means.;COPYRIGHT: (C)2014,JPO&INPIT
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