High precision applications, such as, semiconductor manufacturing and diamond turning of optical elements require positioning accuracy within nanometers and therefore require very precise motion control of machine tool axes. The frictional behavior at the slides is a result of very complex interaction between the contacting surfaces and lubricants. No accurate quantitative prediction of the friction behavior is possible based on the given material and surface properties. One must therefore address the frictional behavior through carefully designed experiments. In this work the experimental data for unidirectional and reciprocating motions of machine slides have been employed. Specific studies include the micro-dynamics of a hydraulically actuated slide-way and that of a ball-screw driven precision slide system. The frictional behavior may be divided in two regimes: pre-sliding and gross sliding. The pre-sliding responses have been studied by investigating micro-slip and frictional memory as well as material hysteresis.
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