SPECIMEN HOLDER FOR SCANNING ELECTRON MICROSCOPE, OBSERVATION SYSTEM FOR SCANNING ELECTRON MICROSCOPE IMAGE, AND OBSERVATION METHOD OF SCANNING ELECTRON MICROSCOPE IMAGE

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of observing a biological specimen in an alive state with a high resolution/high contrast using a scanning electron microscope.SOLUTION: On the side of a first insulative thin film 203 provided below a conductive thin film 201, an aqueous solution 20 with an observation specimen 10 in a dissolved state or the like is held. When an electron beam incident portion is charged minus, electric dipoles of water molecules are arrayed along a potential gradient, and an electric charge is also generated on a surface of a second insulative thin film 204. This electric charge is detected by a terminal part 210 and becomes a measurement signal. In the state where an electron beam 102 is shielded, the minus potential disappears. Thus, the electric charge on a surface of the first insulative thin film also disappears and the measurement signal outputted from the terminal part 210 also becomes 0. By repeating such electron beam ON/OFF in a frequency of 1 kHz or higher, a signal of a frequency component similar thereto can be extracted from the terminal part 210.