Complex type silencer, and dry vacuum pump device

摘要

PROBLEM TO BE SOLVED: To provide a composite type silencer enabling miniaturization and capable of effectively reducing a noise in a wide frequency region from a low frequency region to a high frequency region, and a dry vacuum pump device comprising the silencer.;SOLUTION: The composite type silencer comprises a resonance type silencer 53-1 disposed on the upstream side of a gas flow of a gas passage 61, and an expansion type silencer 53-2 disposed on the downstream side so that the resonance type silencer 53-1 and the expansion type silencer 53-2 are formed integrally. The dry vacuum pump device comprises a dry vacuum pump, the composite type silencer in an exhaust passage of the dry vacuum pump so that the resonance type silencer is disposed on the upstream side of the exhaust gas flow, and the expansion type silencer disposed on the downstream side.;COPYRIGHT: (C)2012,JPO&INPIT