In many industrial application, the oil in a modern rotary pump can cause problems in all kinds of different ways; the mechanical action of the vanes working on the oil creates a continuous flux of votatite fractions which cause the phenomenon of back migration. Defective antisuchback mechnisms can occasionally cause the sucking back of the pump’s oil charge into pumped systems, thereby causing considerable damage, contamination, and downtime. In addition, in many cases large amounts of particulates are generated which have to be pumped. When compressing to atmospheric pressure, additional problems such as concensation, sublimation and other reactions may occur. In recent years, all kinds of dry vacuum pumps have been made in order to meet the needs of the some industrial processes.This paper reviews developments about the dry vacuum pump. The dry vacuum clam-type pump is the best one of the pumps, it’s volume coefficient and the equilibrium of claw-type rotors will been discussed.
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