Dimension measurement apparatus and method of the circuit pattern using a scanning electron microscope

摘要

PROBLEM TO BE SOLVED: To automatically image a desired evaluation point (EP) on a sample, and automatically measure a circuit pattern formed at the evaluation points, in the dimension measurement of a circuit pattern using a scanning electron microscope (SEM).;SOLUTION: In the dimension measurement of a circuit pattern using a scanning electron microscope (SEM), it is arranged that coordinate data of the EP and design data of the circuit pattern including the EP are used as an input, creation of a dimension measurement cursor for measuring the pattern existing in the EP and selection or setting of the dimension measurement method are automatically performed based on the EP coordinate data and the design data to automatically create a recipe, and automatic imaging/measurement is performed using the recipe.;COPYRIGHT: (C)2010,JPO&INPIT