Review of Electronic Speckle Pattern Interferometry(ESPI) for Three Dimensional Displacement Measurement

摘要

Three dimensional(3D)displacements,which can be translated further into 3D strain,are key parameters for design,manufacturing and quality control.Using different optical setups,phase-shift methods,and algorithms,several different 3D electronic speckle pattern interferometry(ESPI)systems for displacement and strain measurements have been achieved and commercialized.This paper provides a review of the recent developments in ESPI systems for 3D displacement and strain measurement.After an overview of the fundamentals of ESPI theory,temporal phase-shift,and spatial phase-shift techniques,3D deformation measurements by the temporal phase-shift ESPI system,which is suited well for static measurement,and by the spatial phase-shift ESPI system,which is particularly useful for dynamic measurement,are discussed.For each method,the basic theory,a brief derivation and different optical layouts are presented.The state of art application,potential and limitation of the ESPI systems are shown and demonstrated.