Adsorption state determination method of a substrate and electrostatic chucking device

摘要

Can grasp adsorption state of the substrate quickly and accurately the electrostatic chuck device which has the adsorption distinction means which is offered, in addition, can grasp adsorption state of the substrate with the electrostatic chuck device quickly and accurately adsorption state distinction manner of the substrate which is offered. It is the electrostatic chuck device which has the electrostatic chuck which makes the substrate adsorb on surface side of the metal infrastructure it is the electrostatic chuck device which features that adsorption distinction means in order to distinguish the adsorption state of the substrate are had in addition, being the manner which distinguishes the adsorption state of the substrate in the electrostatic chuck device which has the electrostatic chuck which makes the substrate adsorb on surface side of the metal infrastructure, through the electrostatic chuck, obtaining the flow of heat from the substrate which is transmitted with the heat flux sensor, it is adsorption state distinction manner of the substrate which features that it distinguishes the adsorption state of the substrate.