Warpage measurement device, levitation conveyor with Ri amount measuring device, and warpage measurement method

摘要

PROBLEM TO BE SOLVED: To make an apparatus (warpage measuring apparatus 47) for performing the measurement of warpage of a thin plate S.;SOLUTION: In consulting a floating behavior table showing the relationship between the position and the floating amount of a thin plate S in a plate width direction which is determined through simulation of a virtual floatation state in which the thin plate S is made to float and relates to warpage specific to the thin plate S and based on the measured floating amount of the thin plate S, the warpage specific to the thin plate S is estimated, thereby measuring the warpage of the thin plate S.;COPYRIGHT: (C)2012,JPO&INPIT