Atomic position fixing device, atomic position fixing method and atomic operation method

摘要

PPROBLEM TO BE SOLVED: To provide an atom position fixing device and atom position fixing method suppressing deviation in relative position between a probe and a sample atom due to the influence of thermal drift and creep. PSOLUTION: A probe 10 or an atom 50 on a surface of a sample is vibrated in two directions parallel to the surface of the sample, and a frequency variation amount of the probe 10 based on interatomic force acting between the probe 10 and the atom 50 is detected. Then, a position of the probe 10 or the atom 50 in the two directions is controlled such that frequency components in the two directions of the detected frequency variation amount become zero (a first method: Fig.1(a)). Alternatively, the probe 10 or the atom 50 on the surface of the sample is rotated on a plane parallel to the surface of the sample, and the frequency variation amount of the probe 10 based on the interatomic force acting between the probe 10 and the atom 50 is detected. Then, a position of the probe 10 or the atom 50 on the plane is controlled such that frequency components in a direction parallel to the plane of the detected frequency variation become zero (a second method: Fig.1(b)). PCOPYRIGHT: (C)2012,JPO&INPIT