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Oxide evaporation material, evaporation thin film, and solar cell
Oxide evaporation material, evaporation thin film, and solar cell
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机译:氧化物蒸镀材料,蒸镀薄膜以及太阳能电池
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摘要
Provided are an oxide tablet for vapor deposition (oxide evaporation material), and a vapor-deposited thin film and a solar cell formed using the same. The tablet comprises a sintered body which contains indium oxide as a main component and cerium and which is subjected to no surface grinding after sintering, in which CompS/CompA=0.9 to 1.1, where the content of cerium in a surface layer to a depth of 5 m from a surface of the sintered body is represented by a Ce/In atomic ratio (CompS), and an average value of the content of cerium in the entire sintered body is represented by a Ce/In atomic ratio (CompA).
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