MEMBRANE MEMS ACTUATOR INCLUDING FLUIDIC IMPEDANCE STRUCTURE

摘要

A liquid dispenser includes a first liquid chamber including a nozzle and a second liquid chamber. A flexible membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber. A heater is associated with the second liquid chamber. A liquid supply channel is in fluid communication with the second chamber. A liquid return channel is in fluid communication with the second chamber. A liquid supply provides a liquid that flows continuously from the liquid supply through the liquid supply channel through the second liquid chamber through the liquid return channel and back to the liquid supply. A fluidic impedance structure is positioned in the second liquid chamber between the heater and the liquid return channel.