Electrostatic MEMS actuator, microfluidic drive device including a micro-pump, the printing apparatus including a microfluidic discharge apparatus and an inkjet printer including an ink jet printer head

摘要

PROBLEM TO BE SOLVED: To reduce power consumption, lengthen the life, improve the reliability of a diaphragm and attain high performance as electrostatic MEMS actuator, in the electostatic MEMS actuator applied to a printing apparatus including an ink jet printer, a microfluid driving device, and a microfluid discharge device including an ink jet printer head.;SOLUTION: In the electrostatic MEMS actuator, a lower electrode 35 (35A, 35B) and an upper electrode 38 (38A, 38B) of the diaphragm 39 (39A, 39B) in two or more adjacent MEMS elements are respectively formed independently of each other. The width L of the lower electrode 35 is set larger than the space W between both anchor parts 46 supporting the diaphragm. In the adjacent MEMS elements, the upper electrode 38B of the diaphragm of one MEMS element and the lower electrode 3A of the other MEMS element are electrically connected to each other. These configurations are suitably combined to constitute the electrostatic MEMS actuator.;COPYRIGHT: (C)2006,JPO&NCIPI