A Piezoelectrically Actuated MEMS Speaker with Polyimide Membrane and Thin Film Pb(Zr,Ti)O3(PZT) Actuator

摘要

This paper reports on a new microspeaker actuated by a thin film PZT actuator for low voltage operation and low power consumption. The proposed microspeaker is implemented using microelectromechanical systems (MEMS) technology to reduce form factor and it is composed of flexible polyimide membrane for higher output pressure. We successfully fabricated the microspeaker and demonstrated its feasibility by measuring sound pressure level from 200 Hz to 10 kHz. The SPL (Sound Pressure Level) measured was 79 dB at 1 kHz, 87 dB at 5 kHz and 90 dB at 10 kHz respectively, with an actuation voltage of 13 V.